发明名称 CLAMPING DEVICE, ASSEMBLY AND LITHOGRAPHIC PROJECTION APPARATUS
摘要 A clamping device is constructed and arranged to clamp two parts together. The clamping device includes an aligner constructed and arranged to bring the two parts in an aligned position with respect to each other, a clamp constructed and arranged to maintain the two parts in the aligned position, a disconnect constructed and arranged to guide the two parts away from the aligned position to a disconnected position, and an actuator constructed and arranged to convert an electrical current to kinetic energy. The aligner, the clamp, and the disconnect are constructed and arranged to be driven by the actuator.
申请公布号 US2012320357(A1) 申请公布日期 2012.12.20
申请号 US201213523553 申请日期 2012.06.14
申请人 VELTMAN ROBERTUS WILHELMUS;PAULUSSEN DENNIS JOZEF MARIA;BOON MAARTEN KEES JAN;ASML NETHERLANDS B.V. 发明人 VELTMAN ROBERTUS WILHELMUS;PAULUSSEN DENNIS JOZEF MARIA;BOON MAARTEN KEES JAN
分类号 G03B27/54 主分类号 G03B27/54
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