发明名称 |
IMPROVEMENTS TO THE APPLICATION OF COATING MATERIALS |
摘要 |
The invention relates to apparatus and a method for applying coatings to a substrates such as, for example, a lens or electronic component. The apparatus includes a coating chamber in which there is provided one or more magnetrons which include, typically, an at least partially oxidised metal or metal alloy. A carrier is provided for the substrates to be moved and held in the coating chamber and the carrier is formed from a plurality of units on which the substrates are position and the units can be brought together to form the carrier. |
申请公布号 |
WO2012168709(A2) |
申请公布日期 |
2012.12.13 |
申请号 |
WO2012GB51277 |
申请日期 |
2012.06.07 |
申请人 |
POWER VISION LIMITED;WAUGH, ALLEN ROBERT;HALL, GARETH WILLIAM;STANLEY, STEVEN ANTHONY |
发明人 |
WAUGH, ALLEN ROBERT;HALL, GARETH WILLIAM;STANLEY, STEVEN ANTHONY |
分类号 |
H01J37/34;H01J37/32 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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