| 发明名称 |
Using Three-Dimensional Representations for Defect-Related Applications |
| 摘要 |
Various embodiments for using three-dimensional representations for defect-related applications are provided.
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| 申请公布号 |
US2012316855(A1) |
申请公布日期 |
2012.12.13 |
| 申请号 |
US201113156323 |
申请日期 |
2011.06.08 |
| 申请人 |
PARK ALLEN;CHANG ELLIS;AJI PRASHANT A.;LANGE STEVEN R.;KLA-TENCOR CORPORATION |
发明人 |
PARK ALLEN;CHANG ELLIS;AJI PRASHANT A.;LANGE STEVEN R. |
| 分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
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