ILLUMINATION METHOD, ILLUMINATION OPTICAL DEVICE, AND EXPOSURE DEVICE

摘要

This illumination method, which illuminates a reticle surface using illumination light supplied from a light source, includes: setting a drive signal for controlling the angle of reflection of incident light for a plurality of mirror elements of a spatial light modulator; illuminating the reticle surface using illumination light via the plurality of mirror elements; monitoring the integrated energy of the illumination light via an integrator sensor; and correcting the drive signal of the plurality of mirror elements on the basis of the monitoring results of the integrated energy. It is possible to suppress fluctuations in light intensity distribution when illuminating an irradiated surface using the plurality of optical elements that can control the state of incident light.