Process for the collective fabrication of calibration-free sensors based on acoustic wave devices

摘要

The invention relates to a process for the collective fabrication of a remotely interrogable sensor having at least one first resonator and one second resonator. Each resonator exhibits respectively a first and a second operating frequency. A first series of first resonators are fabricated. The first resonators each have a first operating frequency belonging to a first set of frequencies centered on a first central frequency. A second series of second resonators are fabricated. The second resonators each having a second operating frequency belonging to a second set of frequencies centered on a second central frequency. A series of pairings of a first resonator and of a second resonator are conducted so as to form pairs of resonators exhibiting a difference of operating frequencies which is equal to the difference of the first and second central frequencies.