| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem wherein, though nitrogen-including fullerene is a novel material having anticipation of application to a quantum computer or the like, when using a conventional production device of the nitrogen-including fullerene, the yield is low such as 10<SP POS="POST">-4</SP>to 10<SP POS="POST">-3</SP>%. <P>SOLUTION: A production device including a potential-controllable grid electrode and an end plate electrode individually near a deposition substrate is used, and a nitrogen gas pressure is heightened, and the temperature of a fullerene sublimation oven is set at a high temperature over 700°C, and each potential of the electrodes and the deposition substrate is controlled respectively independently, to thereby synthesize nitrogen-including fullerene. Thus, the world highest synthesis purity 0.5% can be obtained by optimizing conditions of the synthesis process. <P>COPYRIGHT: (C)2013,JPO&INPIT |
