INTEGRATED CIRCUIT INSPECTION DEVICE

摘要

Provided is an integrated circuit inspection device for inspecting an integrated circuit having a semiconductor substrate and a circuit unit which is formed on the obverse side of the semiconductor substrate, said device comprising: a light emitting unit which emits light which is projected on the integrated circuit; a wavelength width adjustment unit which adjusts the wavelength width of the light which is projected on the integrated circuit; a projection location adjustment unit which adjusts the projection location of the light which is projected on the integrated circuit; and a light detection unit which detects light from the integrated circuit when the light from the light emitting unit is projected on the circuit unit via the reverse face of the semiconductor substrate.