| 摘要 |
<p>PURPOSE: A temperature measuring apparatus, a temperature measuring method, storage medium, and a heating treatment apparatus are provided to estimate temperature distribution within a vacuum container formed in a film forming apparatus by measuring a plurality of spots of a peripheral direction of a rotary table. CONSTITUTION: A rotary driving tool(12a) rotates a rotary table(12) in a peripheral direction. Five concave parts(16) for loading a wafer(W) are formed on the surface of the rotary table. A vacuum container(11) is installed under the atmosphere environment and hermetically maintains inside. The vacuum container comprises a seal member(11a), an exhaust port(26), and a cover(14a) which covers the center of a container body(14). [Reference numerals] (5) Control unit; (AA) N2 gas</p> |
