| 摘要 |
PURPOSE: A carrier head is provided to improve the rotation of a membrane holder by interlocking an inner circumferential surface with an outer circumferential surface of a connection base. CONSTITUTION: A driver(110) is located on the upper side of a carrier head(100). The driver is rotated by being connected to a driving shaft. A connection base is rotated by being interlocked with the driver. A retainer ring(130) is fixed to the connection base. A membrane holder(140) is rotated by being interlocked with the inner circumferential surface of a retainer ring fixing element.
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