发明名称 |
APPARATUS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT DEVICE FABRICATION INCLUDING WAFER SCALE MEMBRANE |
摘要 |
Apparatus configured for the fabrication of three-dimensional integrated devices and three-dimensional integrated devices fabricated therefrom are described. A device side of a donor wafer is coated with a polymer film and exposure of a substrate side to an oxidizing plasma creates a continuous SiO2 film. Portions of the substrate side are selectively coated with a polymer film and etching of uncoated areas removes at least a substantial portion of the crystalline substrate. A plasma etch tool etches a crystalline substrate to within a pre-determined thickness. The silicon portions of the substrate side are etched by exposure to TMAH. After etching, the donor semiconductor wafer is supported by portions of the substrate that were not etched. The supporting structure allows flexing of the donor semiconductor wafer within the etched areas to enable conformality and reliable bonding to the device surfaces of an acceptor wafer to form a three dimensional integrated device. |
申请公布号 |
US2012299145(A1) |
申请公布日期 |
2012.11.29 |
申请号 |
US201213570656 |
申请日期 |
2012.08.09 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LA TULIPE, JR. DOUGLAS C.;PURUSHOTHAMAN SAMPATH;VICHICONTI JAMES |
分类号 |
H01L25/00;H01L21/306 |
主分类号 |
H01L25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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