| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology advantageous for making the improvement of measuring accuracy and the expansion of a measuring range compatible, in measuring of the height of a measured surface. <P>SOLUTION: A measuring device includes a detecting portion in which a plurality of areas for detecting interference light intensity of reference light and measurement light is two-dimensionally aligned; a first optical system which separates light from a light source into first and second light; a producing portion into which the first light is emitted as parallel light, and which produces a plurality of reference light fluxes having two-dimensionally optical path length difference; a second optical system for making the reference light incident into the detecting portion so as to make each of the plurality of the reference light fluxes of the reference light produced by the producing portion incident into the plurality of the corresponding areas; a third optical system for concentrating the second light into a measuring point on a surface to be measured; a fourth optical system for making the second light incident into the detecting portion so as to make the second light reflected at the measuring point incident into each of the plurality of the areas; and a processing portion which calculates the height of the surface to be measured at the measuring point from the intensity of the interference light detected in the plurality of the areas, on the basis of a correspondence relationship between the optical path length of the plurality of the reference light fluxes incident into the plurality of the areas and the plurality of the areas. <P>COPYRIGHT: (C)2013,JPO&INPIT |
