| 摘要 |
A cross-sectional profile measuring method of measuring cross-sectional profiles of an object at plural measurement sections of the object with a contact probe, includes: circularly moving the probe along a route around a circumference of the object at one of the measurement sections, a distance of the moving being longer than a measurement range corresponding to the circumference of the object by a predetermined overlapping range consisting of an acceleration range and a deceleration range; and moving the probe to next one of the measurement sections through a transfer range in a movement direction oblique to a continuous direction in which the cross-sectional profiles are adjacent to one another to offset a distance corresponding to the overlapping range. |
