发明名称 |
ASSEMBLY TO SELECTIVELY ETCH AT INKJET PRINTHEAD |
摘要 |
An assembly for selectively etching an inkjet printhead includes a substrate and printhead layers formed on the substrate. A bonding region can provide a location on the printhead layers for an electrical bond. An ink channeling region can be defined at least in part by the printhead layers. A mask layer can partially cover the printhead layers and include a first opening positioned over the bonding region and a second opening positioned over the ink channeling region. The assembly can also include a via at the first opening and a trench at the second opening having greater depth than the via.
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申请公布号 |
US2012298622(A1) |
申请公布日期 |
2012.11.29 |
申请号 |
US201113117745 |
申请日期 |
2011.05.27 |
申请人 |
WHITE LAWRENCE H.;VINA ROBEL;HOMEIJER SARA JENSEN;MCMAHON TERRY |
发明人 |
WHITE LAWRENCE H.;VINA ROBEL;HOMEIJER SARA JENSEN;MCMAHON TERRY |
分类号 |
C23F1/02;B32B3/00;C23F1/08 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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