A device comprising a gas sensor sensitive to the presence of a specific gas, method of manufacturing a gas sensor sensitive to the presence of a specific gas for use in the device and use of the device

摘要

A device (100) comprising a gas sensor sensitive to the presence of a specific gas, the gas sensor comprising: a first segment (102) made of a dielectric material; and a second segment (104) made of a semiconducting material; wherein: the first segment (102) has a first surface (108) that is exposed to an environment of the gas sensor; the first segment (102) is located between the environment and the second segment (104); the first segment (102) has a first thickness; the second segment (104) has a second thickness (112); wherein the first thickness is selected such that upon diffusion of a gas molecule of the specific gas into the first segment (102), a dipole of the molecule of the specific gas detectably influences a bending of an energy-band structure of the semiconducting material of the second segment (104); and wherein the second thickness is in the order of the Debye length of the semiconducting material or smaller than the Debye length of the semiconducting material.