发明名称 METHOD FOR CALCULATING TEMPERATURE DISTRIBUTION IN CRUCIBLE
摘要 Provided is a method of calculating a temperature distribution with higher accuracy than a conventional method, which calculates a temperature distribution of an inner surface of a silica powder molded body during manufacturing based on boundary conditions corrected in accordance with the actually measured temperature in consideration of plasma radiation by arc discharge and heat radiation of arc discharge. According to a method of calculating a temperature distribution of a crucible during manufacturing, includes a temperature calculation process in which a temperature calculator calculates temperature distribution in an inner surface of a silica powder molded body through a numerical calculation method which mesh-divides an object to be calculated, by calculating heat flux from heat plasma modeled by a gas flow and radiation of heat plasma radiated from arc electrodes, wherein the temperature distribution is calculated by adjusting gas flow and radiation conditions in a way that the calculated temperature distribution and the actually measured temperature distribution of an inner surface of a silica powder molded body becomes similar, and reading, from a correspondence table, gas flow and radiation conditions corresponding each step of a control sequence for producing a crucible.
申请公布号 EP2385025(A4) 申请公布日期 2012.11.28
申请号 EP20100837614 申请日期 2010.12.14
申请人 JAPAN SUPER QUARTZ CORPORATION;SHIBAURA INSTITUTE OF TECHNOLOGY 发明人 SUDO, TOSHIAKI;SUZUKI, ERIKO;ONO, NAOKI
分类号 C03B19/09;C30B15/10;G06F17/50 主分类号 C03B19/09
代理机构 代理人
主权项
地址