发明名称 Lithographic apparatus and device manufacturing method
摘要 Fluid temperature control and sensor calibration is disclosed. In an embodiment, a fluid temperature control unit includes a heater configured to heat a first fluid in a first fluid path, a first temperature sensor configured to measure a temperature of the first fluid in the first fluid path, a second temperature sensor configured to measure a temperature of a second fluid in a second fluid path, and a controller configured to control the heater on the basis of the temperature sensed by the first sensor and the temperature sensed by the second sensor.
申请公布号 US8319157(B2) 申请公布日期 2012.11.27
申请号 US20100843614 申请日期 2010.07.26
申请人 MARTENS ARJAN HUBRECHT JOSEF ANNA;KRAMER PIETER JACOB;ASML NETHERLANDS B.V. 发明人 MARTENS ARJAN HUBRECHT JOSEF ANNA;KRAMER PIETER JACOB
分类号 H05B1/02 主分类号 H05B1/02
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