| 摘要 |
<P>PROBLEM TO BE SOLVED: To reliably block the intrusion of an evaporant into other crucible and prevent mutual contamination of crucibles by providing a mobile blocking body-lifting unit so that the evaporant does not intrude into other crucible when evaporating a material to be evaporated. <P>SOLUTION: A multipoint evaporation source device includes: a turntable 2 provided with a plurality of crucibles in which the evaporant 3 is stored and rotating around a rotary shaft as a center; an electron gun 1 for evaporating the evaporant 3 in the crucible 7 by irradiating one crucible 7 positioned at the irradiation location of an electron beam with the electron beam; and a cover 6 which is located on the upper aspect of the turntable 2, covers a plurality of crucibles 7 and has all opened irradiation regions of the electron beam facing the gun 1. The device also comprises: a groove 24 formed on the upper face of the table 2 so as to partition the crucibles 7; a blocking body 20 fitting into the groove 24, partitioning each crucible and rotating together with the table 2; and a blocking body-lifting unit elevating the blocking body 20 and narrowing the interval of the blocking body 20 and the cover 6 when each of the crucibles come at the beam irradiation position. <P>COPYRIGHT: (C)2013,JPO&INPIT |
