| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an appearance inspection device capable of accurately inspecting appearance of an inspected object without missing a minute flaw, etc. <P>SOLUTION: An appearance inspection device (1 or 1') in the invention inspects a surface of an inspected object (2 or 2') by exposing the inspected object (2 or 2') to a transmitted or reflected light. In the device, a boundary area between a bright section and a dark section is formed on the surface of the inspected object (2 or 2') by partially blocking the transmitted or reflected light emitted to the inspected object (2 or 2'), and the transmitted or reflected light moves relative to the inspected object (2 or 2'). The device takes multiple images (A<SB POS="POST">1</SB>to A<SB POS="POST">n</SB>) of the surface of the inspected object (2 or 2') while moving the transmitted or reflected light relative to the inspected object (2 or 2'), combines images (extracted images B<SB POS="POST">1</SB>to B<SB POS="POST">n</SB>) near the boundary area among the images (A<SB POS="POST">1</SB>to A<SB POS="POST">n</SB>) and determines the combined image as one inspection image (C). <P>COPYRIGHT: (C)2013,JPO&INPIT |
