| 摘要 |
PURPOSE: An apparatus for controlling the supply of raw materials is provided to maintain uniform thickness and quality of light emitting diodes deposited on a substrate by controlling the speed of moving raw materials in a raw material container close to a heater according to the amount of raw materials consumed. CONSTITUTION: An apparatus for controlling the supply of raw materials comprises a raw material container(110), a heater(120), a sensor unit(160), a transfer unit(150), and a control unit(170). The raw material container accommodates solid or liquid materials(1) to be deposited on a substrate. The heater applies heat to the raw material container in order to vaporize the raw materials accommodated in the raw material container. The sensor unit is located separately from the raw material container and senses the amount of raw materials vaporized from the raw material container. The transfer unit reciprocates the raw material container up and down. The control unit controls the transfer unit to transfer the raw material container at different speeds according to the sensed amount of vaporized raw materials.
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