Adjustment of an optical surface to be tested in a test device

摘要

A wavefront coefficient set (70) for description of wavefront of object light is determined from detected interferogram (54) showing interference between light from optical surface (34) and reference light. A neural network (64) for optical surface is provided for assigning position deviation of optical surface with target position. The determined wavefront coefficient set is provided as input data of neural network to determine position deviation of optical surface. The position of optical surface in testing apparatus is corrected based on determined position deviation of optical surface. Independent claims are included for the following: (1) system for adjusting target optical surface of target object; and (2) testing apparatus.