发明名称 GAS ANALYZER
摘要 A plurality of molecular components contained in a gas are to be ionized together at the same time by the PI method. For example, a plurality of molecular components contained in a gas generated at a certain instant are accurately analyzed in real-time based on the PI method. A gas analyzer includes a gas conveyor 4 that conveys a gas generated from a sample S in a sample chamber R0 to an analysis chamber R1, an ionizer 19 that ionizes the gas, a quadrupole filter 21 that separates ions for each mass-to-charge ratio, and an ion detector 22 that detects the separated ions. The ionizer 19 has an ionizing region provided near a gas outlet of the gas conveyor 4 and a lamp 33A that applies light to the ionizing region. Since the lamp 33A emits light having an light directivity lower than that of laser light and traveling in a spreading manner, the gas having entered the ionizing region in the ionizer 19 receives light irradiation in a wide range, and a plurality of gas components therein are ionized.
申请公布号 EP2006672(A4) 申请公布日期 2012.11.21
申请号 EP20070736895 申请日期 2007.03.16
申请人 RIGAKU CORPORATION;HAMAMATSU PHOTONICS K. K. 发明人 ARII, TADASHI;TAKATA, YOSHIHIRO;OTAKE, SATOSHI;MATSUURA, SHIGEKI
分类号 G01N27/64;G01N27/62;H01J49/08;H01J49/10;H01J49/16 主分类号 G01N27/64
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