发明名称 |
Telecentricity corrector for microlithographic projection system |
摘要 |
A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle. |
申请公布号 |
US8314922(B2) |
申请公布日期 |
2012.11.20 |
申请号 |
US20090494882 |
申请日期 |
2009.06.30 |
申请人 |
CORNELL JIM D;MALACH JOSEPH D;MICHALOSKI PAUL FRANCIS;WEBB JAMES EDSON;CORNING INCORPORATED |
发明人 |
CORNELL JIM D;MALACH JOSEPH D;MICHALOSKI PAUL FRANCIS;WEBB JAMES EDSON |
分类号 |
G03B27/68;G03B27/52 |
主分类号 |
G03B27/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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