| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a film which can form a thin film having high durability while shortening a lead time, and to provide a method for manufacturing a liquid ejecting head. <P>SOLUTION: The method for forming the film includes: a thin film forming step of rapidly heating and evaporating a repellent material while heating a substrate to form a thin film of the repellent material on the substrate so that particles of the repellent material is combined with the substrate; and a washing step of washing out the thin film formed on the substrate successively to the thin film forming step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
