发明名称 METHOD OF MANUFACTURING POLY-SILICON TFT ARRAY SUBSTRATE
摘要 An embodiment of the present disclosure relates to a method of manufacturing a poly-silicon TFT array substrate, which accomplishes a patterning process to form a gate electrode, a poly-silicon semiconductor pattern and a pixel electrode with one process by using an HTM or GTM mask.
申请公布号 US2012289006(A1) 申请公布日期 2012.11.15
申请号 US201213468280 申请日期 2012.05.10
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 YUAN GUANGCAI
分类号 H01L21/336 主分类号 H01L21/336
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