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发明名称
SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD FOR SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR101201351(B1)
申请公布日期
2012.11.14
申请号
KR20120009548
申请日期
2012.01.31
申请人
发明人
分类号
H01L21/00;H01L21/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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