发明名称 FILM MEMBER, FILM TARGET FOR LASER-DRIVEN ION ACCELERATION AND MANUFACTURING METHODS THEREOF
摘要 PURPOSE: A method for manufacturing a thin film member for accelerating laser-induced ions, a thin film target using the same, and a manufacturing method thereof are provided to accelerate ion from a thin film member by moving only a thin film target on a two-dimensional plane to focus a laser beam multiple times. CONSTITUTION: A method for manufacturing a thin film member for accelerating laser-induced ions comprises the steps of: preparing a thin film member solution containing thin film materials to be used for accelerating laser-induced ion, forming a thin film member(110) on a base substrate(200) using the thin film member solution, and dipping the base substrate in a delamination solvent to separate the thin film member from the base substrate. [Reference numerals] (AA) Thin film member formation; (BB) Thin film member separation; (CC) Thin film target completion
申请公布号 KR20120124951(A) 申请公布日期 2012.11.14
申请号 KR20110042913 申请日期 2011.05.06
申请人 发明人
分类号 C23C14/34;H05H13/00 主分类号 C23C14/34
代理机构 代理人
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