| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing device which allows switching of software interlock to be easily set and can display its settings. <P>SOLUTION: A substrate processing device 10 includes display means 18 for displaying an operation screen for operating information on substrate processing, and control means 14 for executing a substrate processing recipe for executing substrate processing. When the control means accepts software interlock settings in accordance with the substrate processing recipe, it controls the display means so that setting of software interlock is reflected at the head of the substrate processing recipe and contents of the set software interlock are displayed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
