| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily remove a mold from a material to be molded by remarkably reducing mold release resistance without using a releasing agent. <P>SOLUTION: In an imprint device 1 for molding the material to be molded by transferring a desired pattern formed on the mold 30 to the material to be molded, the pressure in a space including at least the mold 30 and the material to be molded is controlled. Concretely, in demolding for removing the mold 30 from the material to be molded, the pressure in the space including the mold 30 and the material to be molded is reduced so as to be close to the pressure between the mold 30 and the material to be molded. <P>COPYRIGHT: (C)2013,JPO&INPIT |
