发明名称 Single Crystal Ge On Si
摘要 A single crystal germanium-on-silicon structure includes a single crystal silicon substrate. A single crystal layer of gadolinium oxide is epitaxially grown on the substrate. The gadolinium oxide has a cubic crystal structure and a lattice spacing approximately equal to the lattice spacing or a multiple of the single crystal silicon. A single crystal layer of lanthanum oxide is epitaxially grown on the gadolinium oxide with a thickness of approximately 12 nm or less. The lanthanum oxide has a lattice spacing approximately equal to the lattice spacing or a multiple of single crystal germanium and a cubic crystal structure approximately similar to the cubic crystal structure of the gadolinium oxide. A single crystal layer of germanium with a (111) crystal orientation is epitaxially grown on the layer of lanthanum oxide.
申请公布号 US2012280276(A1) 申请公布日期 2012.11.08
申请号 US201213425079 申请日期 2012.03.20
申请人 DARGIS RYTIS;ARKUN ERDEM;CLARK ANDREW;LEBBY MICHAEL 发明人 DARGIS RYTIS;ARKUN ERDEM;CLARK ANDREW;LEBBY MICHAEL
分类号 H01L21/20;H01L29/165 主分类号 H01L21/20
代理机构 代理人
主权项
地址