FOUP FOR STORING WAFER AND WAFER PROCESSING APPARATUS USING THE SAME

摘要

PURPOSE: An FOUP(front opening unified pod) for storing a wafer and a wafer processing device using the same are provided to improve the reliability of a wafer mapping process by preventing the reflection of light in the FOUP. CONSTITUTION: A plurality of wafers is loaded in a body(110). One side of the body is opened. A cover(135) is installed on the one side of the body to be moved vertically. The cover connects or blocks the inside to the outside of the body. A light anti-reflection means is prepared on the inner side of the body or the cover.