APPARATUS AND METHOD OF INSPECTING A DEFECT ON SEMICONDUCTOR SUBSTRATE USING SCATTERED LIGHT OCCURRED FROM WHITE LIGHT,申请号KR20110029155-传众专利搜索

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发明名称	APPARATUS AND METHOD OF INSPECTING A DEFECT ON SEMICONDUCTOR SUBSTRATE USING SCATTERED LIGHT OCCURRED FROM WHITE LIGHT
摘要
申请公布号	KR101196708(B1)	申请公布日期	2012.11.07
申请号	KR20110029155	申请日期	2011.03.31
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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