摘要 |
<p>A liquid immersion member (6) holds liquid (LQ) between the liquid immersion member and an object such that an optical path (K) of exposure light (EL) applied to the object is filled with the liquid (LQ), thereby forming a liquid immersion space (LS). In the liquid immersion member (6), an amorphous carbon film is formed on at least a part of a region coming into contact with the liquid (LQ).</p> |