发明名称 LIQUID IMMERSION MEMBER, METHOD FOR MANUFACTURING LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 <p>A liquid immersion member (6) holds liquid (LQ) between the liquid immersion member and an object such that an optical path (K) of exposure light (EL) applied to the object is filled with the liquid (LQ), thereby forming a liquid immersion space (LS). In the liquid immersion member (6), an amorphous carbon film is formed on at least a part of a region coming into contact with the liquid (LQ).</p>
申请公布号 EP2521163(A1) 申请公布日期 2012.11.07
申请号 EP20100840919 申请日期 2010.12.21
申请人 NIKON CORPORATION 发明人 TAKI YUSUKE
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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