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发明名称
Method for determining the chemical composition of AlxGa1-xAsySb1-y layers
摘要
申请公布号
PL394717(A1)
申请公布日期
2012.11.05
申请号
PL20110394717
申请日期
2011.04.29
申请人
INSTYTUT TECHNOLOGII ELEKTRONOWEJ
发明人
JASIK WLADYSLAWA AGATA;KUBACKA-TRACZYK JUSTYNA;SANKOWSKA IWONA;REGINSKI KAZIMIERZ
分类号
G01N33/20;G01N21/88;H01L21/66
主分类号
G01N33/20
代理机构
代理人
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