发明名称 CRUCIBLE APPARATUS FOR ORGANIC THIN FILM DEPOSITION
摘要 PURPOSE: A crucible for depositing an organic thin film layer is provided to reduce a failure rate in a vacuum deposition process by preventing organic material particles from being linearly scattered to a substrate. CONSTITUTION: A crucible(20) heats organic materials in a vacuum chamber. A cover(50) is screwed with the entrance of the crucible. A discharge horn(51) is formed on the lower side of the cover. A discharge hole(52) is slantingly formed in the discharge horn. The organic materials evaporated from the crucible are vacuously deposited on the substrate located in a vacuum chamber.
申请公布号 KR101197271(B1) 申请公布日期 2012.11.05
申请号 KR20120000964 申请日期 2012.01.04
申请人 发明人
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
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