| 摘要 |
PURPOSE: A novel antimony aminoalkoxide compound is provided to bind with oxygen ligand and to manufacture a thin film containing the antimony and to ensure excellent thermal stability and volatility. CONSTITUTION: An antimony aminoalkoxide compound is denoted by chemical formula 1(Sb[O-A-NR1R2]3). A compound of chemical formula 1 is denoted by chemical formula 2(Sb[O-CR3R4(CH2)m-NR1R2]3). A method for preparing the antimony amino alkoxide compounds comprises a step of reacting antimony halide compounds of chemical formula 3(SbX3) and alcohol alkali metal salt of chemical formula 4(M[O-A-NR1R2]). A method for forming a thin film comprises a step of forming a thin film containing antimony using an antimony amino alkoxide compounds as a precursor.
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