| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently wash, in a short time, a separation membrane for use in an apparatus for recovering tetraalkylammonium hydroxide (TAAH) by performing membrane separation treatment to a development waste liquid that contains TAAH, to eliminate impurities in the waste liquid. <P>SOLUTION: The method for washing a TAAH recovery apparatus is carried out by washing the separation membrane for use in the membrane separation treatment, using a TAAH solution, wherein pH of the TAAH solution is preferably 12 or more. Washing using the TAAH solution attains efficient washing of the separation membrane and shortens an extrusion washing step, resulting in shortening time required for a membrane washing step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
