发明名称 HEATING METHOD FOR MAINTAINING HEAT BUDGET STABILITY
摘要 <p>Disclosed is a heating method for maintaining heat budget stability. By inserting a virtual process after a main process, the total time of a heating technique is kept unchanged, thus facilitating the maintenance of heat budget stability, thereby facilitating the maintenance of component performance stability.</p>
申请公布号 WO2012145871(A1) 申请公布日期 2012.11.01
申请号 WO2011CN01313 申请日期 2011.08.09
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;LI, CHUNLONG 发明人 LI, CHUNLONG
分类号 H01L21/00;H01L21/02 主分类号 H01L21/00
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