METHOD OF NANOIMPRINTING A PIEZOELECTRIC POLYMERIC MATERIAL FOR FORMING HIGH ASPECT RATIO NANOPILLARS

摘要

A method of nanoimprinting a piezoelectric polymeric material includes: heating a surface of the piezoelectric polymeric material to an imprinting temperature greater than (Tc−25) ° C. and less than Tc, in which Tc is the Curie temperature of the piezoelectric polymeric material; and pressing the heated surface of the piezoelectric polymeric material using a nanoimprinting template having a nanopillar structure so as to form the piezoelectric polymeric material with high aspect ratio nanopillars.