PRODUCTION METHOD FOR ULTRA-HIGH-PURITY RUTHENIUM (RU) POWDER AND TARGET BY USING WASTE RUTHENIUM (RU) TARGETS

摘要

The present invention relates to a production method for an ultra-high-purity ruthenium powder and target by using waste ruthenium (Ru) targets; being devised in order to overcome disadvantages such as the long time and high costs entailed in dissolving waste targets and producing powder using chemical agents during production through the use of an existing wet method, and environmental pollution problems like waste-water treatment following the use of many types of chemical agents. In order to bring about an improvement, a high-density ruthenium (Ru) target is obtained by straightforwardly eliminating extraneous material and the like on the surface of a waste ruthenium (Ru) target by means of a chemical or mechanical method on the surface, and by using plasma-based ruthenium (Ru) powder production and heat treatment and crushing in fine high-purity ruthenium (Ru) powder production and sintering.