| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma light source which is capable of significantly enhancing output of plasma light to be generated and is capable of prolonging a device life by suppressing a thermal load and electrode wear. <P>SOLUTION: A plasma light source system comprises: a plurality of plasma light sources 10 for periodically emitting plasma light 8 at predetermined light emitting points 1a; and a light-focusing device 40 for focusing the plasma light at the plurality of light emitting points of the plasma light sources, on a single focal point 9. <P>COPYRIGHT: (C)2013,JPO&INPIT |
