| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ionizer having a low applied voltage, and excellent utilization efficiency and heat dissipation of discharge plasma, inexpensively. <P>SOLUTION: Two barrier discharge electrode plates having gas circulation holes are boded to each other, and a U-shaped or V-shaped notch is provided along the wall surface of the circulation hole thus forming a barrier discharge gap. An aluminum or an aluminum alloy plate is used as the barrier discharge electrode plate, and the surface thereof is anodized thus forming a barrier dielectric film. Furthermore, the applied voltage is reduced by laminating a dielectric film having a high relative permittivity on the surface of the anode oxide film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
