MICRO ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a micro electromechanical device with an optical function separated from mechanical and electrical functions.

SOLUTION: A micro electromechanical (MEMS) device (800) comprises: a substrate (20) having a top surface (88); a movable element (810) over the substrate (20); and a drive electrode (82). The movable element (810) comprises; a deformable layer (34); and a reflective element (814) mechanically coupled to the deformable layer (34). The reflective element (814) comprises a reflective surface (92). The drive electrode (82) is disposed in a lateral direction from the reflective surface (92). The movable element (810) responds to voltage difference applied between the drive electrode (82) and the movable element (810) by moving in a direction generally perpendicular to the top surface (88) of the substrate (20).

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