<p>A semiconductor inspection apparatus identifies regions of a reticle or semiconductor wafer appropriate for cell-to-cell inspection by analyzing a semiconductor design database. Appropriate regions can be identified in a region map for use by offline inspection tools.</p>
申请公布号
WO2012148854(A1)
申请公布日期
2012.11.01
申请号
WO2012US34681
申请日期
2012.04.23
申请人
KLA-TENCOR CORPORATION;HESS, CARL;MILLER, JOHN, D.;RUI-FANG, SHI;GUAN, CHUN
发明人
HESS, CARL;MILLER, JOHN, D.;RUI-FANG, SHI;GUAN, CHUN