Solar cell e.g. heterojunction solar cell of solar module, comprises metallic conductive structure that is formed in openings of insulating layers

摘要

The solar cell (100) has electrically insulating layer (106) that is formed on semiconductor substrate (102) through electrically insulating layer (104). An inversion layer (108) with charge carriers is formed in boundary of insulating layer and substrate. The openings are formed in insulating layers. The concentration dopant is increased in region of opening in substrate. A metallic conductive structure is formed in the openings of insulating layers. The insulating layer (104) is made of amorphous silicon oxide and insulating layer (106) is made of nitride or oxide. An independent claim is included for method of manufacturing solar cell.