发明名称 Defect detection method of display device and defect detection apparatus of display device
摘要 A defect detecting method of a display device includes a defect counting process that measures a feature amount for each partial region of a display device (P32), and counts regions which is determined as a defective portion based on the measured feature amount of the region (P36), a process that stops a manufacturing line of the display device when a number of defects counted at the defect counting process is greater than a first threshold value (P38, P42), a defect density calculating process that calculates a defect density in a predetermined area when the number of defects counted at the defect counting process is smaller than the first threshold value (P38), and a process that stops the manufacturing line of the display device when the defect density calculated at the defect density calculating process is higher than a second threshold value (P40, P42).
申请公布号 US8301289(B2) 申请公布日期 2012.10.30
申请号 US20100753517 申请日期 2010.04.02
申请人 NARA KEI;HAMADA TOMOHIDE;NIKON CORPORATION 发明人 NARA KEI;HAMADA TOMOHIDE
分类号 G06F19/00 主分类号 G06F19/00
代理机构 代理人
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