发明名称 Substrates for monolithic optical circuits and electronic circuits
摘要 A multilayer wafer structure containing a silicon layer that contains at least one waveguide, an insulating layer and a layer that is lattice compatible with Group III-V compounds, with the lattice compatible layer in contact with one face of the insulating layer, and the face of the insulating layer opposite the lattice compatible layer is in contact with the silicon layer. The silicon and insulating layers contain either or both of at least one continuous cavity filled with materials such as to constitute a photodetector zone, or at least one continuous cavity filled with materials such as to constitute a light source zone.
申请公布号 US8299485(B2) 申请公布日期 2012.10.30
申请号 US20080810133 申请日期 2008.03.19
申请人 CELLER GEORGE K.;SOITEC 发明人 CELLER GEORGE K.
分类号 H01L33/00;G02B6/12 主分类号 H01L33/00
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