APPARATUS FOR FIXING A MASK AND PROCESSING APPARATUS HAVING THE SAME AND METHOD OF FIXING THE MASK

摘要

PURPOSE: A mask fixing device, a processing device including the same, and a mask fixing method are provided to prevent the misalignment of a substrate and a mask by fixing a center portion after fixing a peripheral portion of the mask. CONSTITUTION: A plurality of peripheral fixing units(420) is formed on a region corresponding to a peripheral region of a mask(200). The mask comprises a mask plate(210) and a mask frame(220). A predetermined pattern is formed on the mask plate. The mask frame supports the edge of the mask plate. One or more mask main fixing units(410) are formed on a region corresponding to a center portion of the mask. The center portion of the mask is fixed by the mask main fixing units after the peripheral region of the mask is firstly fixed by the plurality of peripheral fixing units.