发明名称 |
GROUNDING ASSEMBLY FOR VACUUM PROCESSING APPARATUS |
摘要 |
Vacuum processing chambers having provisions for improved electrical contact to substrate carrier. Specific embodiments provide a plasma processing chamber having a pedestal for supporting the carrier, and a plurality of fixed posts and resilient contacts are distributed over the area of the pedestal. The fixed posts provide physical support for the carrier, while the resilient contacts provide reliable and repeatable multi-point electrical contact to the carrier.
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申请公布号 |
US2012267049(A1) |
申请公布日期 |
2012.10.25 |
申请号 |
US201113093698 |
申请日期 |
2011.04.25 |
申请人 |
STEVENS CRAIG LYLE;BLONIGAN WENDELL THOMAS |
发明人 |
STEVENS CRAIG LYLE;BLONIGAN WENDELL THOMAS |
分类号 |
C23F1/08;C23C16/455;C23C16/458;C23C16/50 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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