Sputter-Vorrichtung und Sputter-Verfahren,申请号DE20091103766T-传众专利搜索

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发明名称	Sputter-Vorrichtung und Sputter-Verfahren
摘要
申请公布号	DE112009003766(T8)	申请公布日期	2012.10.25
申请号	DE20091103766T	申请日期	2009.12.08
申请人	ULVAC, INC.	发明人	MORIMOTO, NAOKI;HAMAGUCHI, JUNICHI
分类号	C23C14/34;H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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