| 摘要 |
<P>PROBLEM TO BE SOLVED: To remove foreign matter adhered to molds efficiently and inexpensively. <P>SOLUTION: A foreign matter-adhering position P<SB POS="POST">1</SB>on a mold 1 indicating presence of a foreign matter F is detected, and adhering position information related to the foreign matter-adhering position P<SB POS="POST">1</SB>is obtained. Corresponding position information related to a foreign matter-corresponding position Q1 on a substrate 2, which is a position corresponding to the foreign matter-adhering position P1 when predetermined alignment is performed with an irregular pattern 13 and a composition arrangement face of the substrate 2 facing each other, is prepared based on the adhering position information. At least one droplet Da comprising a curable composition is arranged at the foreign matter-corresponding position Q1. The irregular pattern 13 is pressed against the composition arrangement face while the predetermined alignment is performed. The curable composition is cured, and the mold 1 is separated from the curable composition. <P>COPYRIGHT: (C)2013,JPO&INPIT |
